검색결과 : 6건
| No. | Article |
|---|---|
| 1 |
Predicting Inplane Distortion from Electron-Beam Lithography on X-Ray Mask Membranes Laird DL, Engelstad RL, Puisto DM, Acosta RE, Cummings KD, Johnson WA Journal of Vacuum Science & Technology B, 14(6), 4308, 1996 |
| 2 |
Optimization of the Refractory X-Ray Mask Fabrication Sequence Cummings KD, Dauksher WJ, Johnson WA, Laudon MF, Engelstad R Journal of Vacuum Science & Technology B, 14(6), 4323, 1996 |
| 3 |
The Effect of Aperturing on Radiation Damage-Induced Pattern Distortion of X-Ray Masks Resnick DJ, Cummings KD, Dauksher WJ, Johnson WA, Seese PA, Chen HT, Wells GM, Engelstad R, Cerrina F Journal of Vacuum Science & Technology B, 13(6), 3046, 1995 |
| 4 |
Method for Fabricating a Low-Stress X-Ray Mask Using Annealable Amorphous Refractory Compounds Dauksher WJ, Resnick DJ, Cummings KD, Baker J, Gregory RB, Theodore ND, Chan JA, Johnson WA, Mogab CJ, Nicolet MA, Reid JS Journal of Vacuum Science & Technology B, 13(6), 3103, 1995 |
| 5 |
Effect of Brightener Concentration on the Thermal Distortion of Gold Plated X-Ray Masks Dauksher WJ, Resnick DJ, Seese PA, Cummings KD, Yanof AW, Johnson WA Journal of Vacuum Science & Technology B, 12(6), 3990, 1994 |
| 6 |
Temperature Uniformity Across an X-Ray Mask Membrane During Resist Baking Resnick DJ, Cummings KD, Johnson WA, Chen HT, Choi B, Engelstad RL Journal of Vacuum Science & Technology B, 12(6), 4033, 1994 |