검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Optical characteristics of sputtered tantalum oxynitride Ta(N,O) films Jong CA, Chin TS Materials Chemistry and Physics, 74(2), 201, 2002 |
| 2 |
Residual stress and thermal expansion behavior of TaOxNy films by the micro-cantilever method Jong CA, Chin TS, Fang WL Thin Solid Films, 401(1-2), 291, 2001 |