검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Investigation of GaAs dry etching in a planar inductively coupled BCl3 plasma Lim WT, Baek IG, Jung PG, Lee JW, Cho GS, Lee JI, Cho KS, Pearton SJ Journal of the Electrochemical Society, 151(3), G163, 2004 |
| 2 |
Optimization of gas flow and etch depth uniformity for plasma etching of large area GaAs wafers Lee JW, Jung PG, Devre M, Westermann R, Pearton SJ Solid-State Electronics, 46(5), 685, 2002 |