검색결과 : 2건
No. | Article |
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1 |
Nucleation of in-Situ Phosphorus-Doped Amorphous-Silicon Films Deposited by Pyrolysis of Si2H6 and PH3 Kobayashi T, Koguchi M, Iijima S, Ohkura M, Wada Y Journal of the Electrochemical Society, 141(5), 1365, 1994 |
2 |
SEMICONDUCTOR NANOWHISKERS YAZAWA M, KOGUCHI M, MUTO A, HIRUMA K Advanced Materials, 5(7-8), 577, 1993 |