화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Epitaxial growth of Si by tow-energy DC-plasma chemical vapor deposition
Mateeva E, Deller HR, Kafader U, Rosenblad C, Von Kanel H, Dommann A
Journal of Materials Science Letters, 17(18), 1545, 1998
2 In-Situ Ballistic-Carrier Spectroscopy on Epitaxial CoSi2/Si(111) and Si(100)
Sirringhaus H, Lee EY, Kafader U, Vonkanel H
Journal of Vacuum Science & Technology B, 13(4), 1848, 1995
3 Epitaxial Metal Silicides - Interface Mapping by Scanning Probe Techniques
Vonkanel H, Lee EY, Sirringhaus H, Kafader U
Thin Solid Films, 267(1-2), 89, 1995