검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Species responsible for Si-H-2 bond formation in a-Si : H films deposited using silane high frequency discharges Shiratani M, Koga K, Kaguchi N, Bando K, Watanabe Y Thin Solid Films, 506, 17, 2006 |
| 2 |
Correlation between volume fraction of clusters incorporated into a-Si : H films and hydrogen content associated with Si-H-2 bonds in the films Koga K, Kaguchi N, Shiratani M, Watanabe Y Journal of Vacuum Science & Technology A, 22(4), 1536, 2004 |