화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Experimental investigation of modern ORC working fluids R1224yd(Z) and R1233zd(E) as replacements for R245fa
Eyerer S, Dawo F, Kaindl J, Wieland C, Spliethoff HM
Applied Energy, 240, 946, 2019
2 Reactive Ion Etching GaAs and AlAs - Kinetics and Process Monitoring
Franz G, Hoyler C, Kaindl J
Journal of Vacuum Science & Technology B, 14(1), 126, 1996
3 Dry-Etching of III/V-Semiconductors - Fine-Tuning of Pattern Transfer and Process-Control
Kaindl J, Sotier S, Franz G
Journal of the Electrochemical Society, 142(7), 2418, 1995