검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Substrate effects on hardness and polishing of SiO2 thin films Kallingal CG, Tomozawa M, Murarka SP Journal of the Electrochemical Society, 145(5), 1790, 1998 |
| 2 |
An investigation of slurry chemistry used in chemical mechanical planarization of aluminum Kallingal CG, Duquette DJ, Murarka SP Journal of the Electrochemical Society, 145(6), 2074, 1998 |
| 3 |
Effect of plasma processing on the morphological evolution of thin films Rajan K, Naeem M, Kallingal CG Chemical Engineering Communications, 153, 221, 1996 |