검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High-Frequency Reactive Ion Etching of Silylated Photoresist Kalpakjian KM, Lieberman MA, Oldham WG Journal of Vacuum Science & Technology B, 12(3), 1351, 1994 |
| No. | Article |
|---|---|
| 1 |
High-Frequency Reactive Ion Etching of Silylated Photoresist Kalpakjian KM, Lieberman MA, Oldham WG Journal of Vacuum Science & Technology B, 12(3), 1351, 1994 |