검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
GaAs etch rate enhancement with SF6 addition to BCl3 plasmas Nordheden KJ, Upadhyaya K, Lee YS, Gogineni SP, Kao MY Journal of the Electrochemical Society, 147(10), 3850, 2000 |
| 2 |
Selective reactive ion etching of GaAs/AlAs in BCl3/SF6 for gate recess Lee YS, Upadhyaya K, Nordheden KJ, Kao MY Journal of Vacuum Science & Technology B, 18(5), 2505, 2000 |
| 3 |
Spectral Studies of Lanthanide Interactions with Membrane Surfaces Karukstis KK, Kao MY, Savin DA, Bittker RA, Kaphengst KJ, Emetarom CM, Naito NR, Takamoto DY Journal of Physical Chemistry, 99(12), 4339, 1995 |