검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Modeling and optimization of oxynitride gate dielectrics formation by remote plasma nitridation of silicon dioxide Kapila D, Hattangady S, Douglas M, Kraft R, Gribelyuk M Journal of the Electrochemical Society, 146(3), 1111, 1999 |
| 2 |
Diffusion-Processes for Integrated Wave-Guide Fabrication in Glasses - A Solid-State Electrochemical Approach Kapila D, Plawsky JL Chemical Engineering Science, 50(16), 2589, 1995 |