화학공학소재연구정보센터
검색결과 : 10건
No. Article
1 Evaluation of oriented lysozyme immobilized with monoclonal antibody
Aoyagi S, Okada K, Shigyo A, Man N, Karen A
Applied Surface Science, 255(4), 1096, 2008
2 The reduction of the change of secondary ions yield in the thin SiON/Si system
Sameshima J, Yamamoto H, Hasegawa T, Nishina T, Nishitani T, Yoshikawa K, Karen A
Applied Surface Science, 252(19), 7190, 2006
3 Quantification of nitrogen profiles in HfSiON films for gate dielectrics
Yamamoto T, Miyamoto T, Karen A
Applied Surface Science, 231-2, 561, 2004
4 Depth profiles of boron and nitrogen in SiON films by backside SIMS
Sameshima J, Maeda R, Yamada K, Karen A, Yamada S
Applied Surface Science, 231-2, 614, 2004
5 Study on change in SIMS intensities near the interface between silicon-nitride film and silicon substrate
Hasegawa T, Date T, Karen A, Masuda A
Applied Surface Science, 231-2, 725, 2004
6 TOF-SIMS measurement of ultra-thin SiO2 films prepared by the graded-etching method
Shibamori T, Muraji Y, Man N, Karen A
Applied Surface Science, 203, 449, 2003
7 SIMS quantification of low concentration of nitrogen doped in silicon crystals
Fujiyama N, Karen A, Sams DB, Hockett RS, Shingu K, Inoue N
Applied Surface Science, 203, 457, 2003
8 SIMS depth profile of copper in low-k dielectrics under electron irradiation for charge compensation
Yamada K, Fujiyama N, Sameshima J, Kamoto R, Karen A
Applied Surface Science, 203, 512, 2003
9 Characterization of high-k gate dielectric films using SIMS
Yamamoto T, Morita N, Sugiyama N, Karen A, Okuno K
Applied Surface Science, 203, 516, 2003
10 TOF-SIMS characterization of industrial materials: from silicon wafer to polymer
Karen A, Man N, Shibamori T, Takahashi K
Applied Surface Science, 203, 541, 2003