검색결과 : 3건
No. | Article |
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1 |
Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation Moert M, Mikolajick T, Schindler G, Nagel N, Kasko I, Hartner W, Dehm C, Kohlstedt H, Waser R Thin Solid Films, 473(2), 328, 2005 |
2 |
Preparation and properties of dc-sputtered IrO2 and Ir thin films for oxygen barrier applications in advanced memory technology Pinnow CU, Kasko I, Dehm C, Jobst B, Seibt M, Geyer U Journal of Vacuum Science & Technology B, 19(5), 1857, 2001 |
3 |
Application of high energy resolved X-ray emission spectroscopy for monitoring of silicide formation in Co/SiO2/Si system Kurmaev EZ, Shamin SN, Galakhov VR, Kasko I Thin Solid Films, 311(1-2), 28, 1997 |