화학공학소재연구정보센터
검색결과 : 3건
No. Article
1 Integration of stacked capacitor module with ultra-thin ferroelectric SrBi2Ta2O9 film for high density ferroelectric random access memory applications at low voltage operation
Moert M, Mikolajick T, Schindler G, Nagel N, Kasko I, Hartner W, Dehm C, Kohlstedt H, Waser R
Thin Solid Films, 473(2), 328, 2005
2 Preparation and properties of dc-sputtered IrO2 and Ir thin films for oxygen barrier applications in advanced memory technology
Pinnow CU, Kasko I, Dehm C, Jobst B, Seibt M, Geyer U
Journal of Vacuum Science & Technology B, 19(5), 1857, 2001
3 Application of high energy resolved X-ray emission spectroscopy for monitoring of silicide formation in Co/SiO2/Si system
Kurmaev EZ, Shamin SN, Galakhov VR, Kasko I
Thin Solid Films, 311(1-2), 28, 1997