검색결과 : 11건
| No. | Article |
|---|---|
| 1 |
Selective etching of AI/AIN structures for metallization of surface acoustic wave devices Engelmark F, Iriarte GF, Katardjiev IV Journal of Vacuum Science & Technology B, 20(3), 843, 2002 |
| 2 |
Structural and electroacoustic studies of AIN thin films during low temperature radio frequency sputter deposition Engelmark F, Iriarte GF, Katardjiev IV, Ottosson M, Muralt P, Berg S Journal of Vacuum Science & Technology A, 19(5), 2664, 2001 |
| 3 |
Synthesis of highly oriented piezoelectric AlN films by reactive sputter deposition Engelmark F, Fucntes G, Katardjiev IV, Harsta A, Smith U, Berg S Journal of Vacuum Science & Technology A, 18(4), 1609, 2000 |
| 4 |
Preferential sputtering effects in thin film processing Berg S, Katardjiev IV Journal of Vacuum Science & Technology A, 17(4), 1916, 1999 |
| 5 |
Compositional variations of sputter deposited Ti/W barrier layers on substrates with pronounced surface topography Jonsson LB, Hedlund C, Katardjiev IV, Berg S Thin Solid Films, 348(1-2), 227, 1999 |
| 6 |
Angular-Dependence of the Polysilicon Etch Rate During Dry-Etching in SF6 and Cl-2 Hedlund C, Jonsson LB, Katardjiev IV, Berg S, Blom HO Journal of Vacuum Science & Technology A, 15(3), 686, 1997 |
| 7 |
Method for the Determination of the Angular-Dependence During Dry-Etching Hedlund C, Strandman C, Katardjiev IV, Backlund Y, Berg S, Blom HO Journal of Vacuum Science & Technology B, 14(5), 3239, 1996 |
| 8 |
Synergistic Sputtering Effects During Ion-Bombardment with 2 Ion Species Berg S, Katardjiev IV Journal of Vacuum Science & Technology A, 13(3), 831, 1995 |
| 9 |
3-Dimensional Simulation of Surface Evolution During Growth and Erosion Katardjiev IV, Carter G, Nobes MJ, Berg S, Blom HO Journal of Vacuum Science & Technology A, 12(1), 61, 1994 |
| 10 |
Preferential Sputtering of Silicon from Metal Silicides at Elevated-Temperatures Hedlund C, Carlsson P, Blom HO, Berg S, Katardjiev IV Journal of Vacuum Science & Technology A, 12(4), 1542, 1994 |