검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Characterization of a Simplified Gas-Distribution for Wafer Cost Reduction in a Plasma Metal Etcher Chou C, Saravanan K, Kava J, Siegel M Journal of Vacuum Science & Technology B, 14(1), 474, 1996 |
| No. | Article |
|---|---|
| 1 |
Characterization of a Simplified Gas-Distribution for Wafer Cost Reduction in a Plasma Metal Etcher Chou C, Saravanan K, Kava J, Siegel M Journal of Vacuum Science & Technology B, 14(1), 474, 1996 |