검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Aspect Ratio-Dependent Etching on Metal Etch - Modeling and Experiment Xie RJ, Kava JD, Siegel M Journal of Vacuum Science & Technology A, 14(3), 1067, 1996 |
| No. | Article |
|---|---|
| 1 |
Aspect Ratio-Dependent Etching on Metal Etch - Modeling and Experiment Xie RJ, Kava JD, Siegel M Journal of Vacuum Science & Technology A, 14(3), 1067, 1996 |