검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Characterizations of pulsed chemical vapor deposited-tungsten thin films for ultrahigh aspect ratio W-plug process Kim SH, Hwang ES, Ha SC, Pyi SH, Sun HJ, Lee JW, Kawk N, Kim JK, Sohn H, Kim J Journal of the Electrochemical Society, 152(6), C408, 2005 |
| 2 |
Pulsed CVD of tungsten thin film as a nucleation layer for tungsten plug-fill Kim SH, Hwang ES, Han SY, Pyi SH, Kawk N, Sohn H, Kim J, Choi GB Electrochemical and Solid State Letters, 7(9), G195, 2004 |