검색결과 : 1건
No. | Article |
---|---|
1 |
Influence of an External Axial Magnetic-Field on the Plasma Characteristics and Deposition Conditions During Direct-Current Planar Magnetron Sputtering Ivanov I, Kazansky P, Hultman L, Petrov I, Sundgren JE Journal of Vacuum Science & Technology A, 12(2), 314, 1994 |