검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Process effects in shallow junction formation by plasma doping Matyi RJ, Felch SB, Lee BS, Strathman MR, Keenan JA, Guo Y, Wang L Journal of Vacuum Science & Technology B, 16(1), 435, 1998 |
| 2 |
The Effect of Tilt Angle on as Implants in Si Anthony JM, Keenan JA Journal of Vacuum Science & Technology A, 13(3), 1321, 1995 |