검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
High precision stress measurement of ion projection lithography mask membranes Torres JL, Wolfe JC, Ruchhoeft P, Kennedy TF, Podolski J, Kragler K, Ehrmann A, Kaesmaier R, Loschner H Journal of Vacuum Science & Technology B, 20(6), 3095, 2002 |