검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultrathin oxynitride formation by low energy ion implantation Khoueir A, Lu ZH, Ng WT, Ma Y Journal of Vacuum Science & Technology A, 18(2), 724, 2000 |
| No. | Article |
|---|---|
| 1 |
Ultrathin oxynitride formation by low energy ion implantation Khoueir A, Lu ZH, Ng WT, Ma Y Journal of Vacuum Science & Technology A, 18(2), 724, 2000 |