검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Ultrahigh-aspect-ratio, SiO2 deeply etched periodic structures with smooth surfaces for photonics applications Hosomi K, Kikawa T, Goto S, Yamada H, Katsuyama T, Arakawa Y Journal of Vacuum Science & Technology B, 24(3), 1226, 2006 |