검색결과 : 4건
| No. | Article |
|---|---|
| 1 |
Control of plasma process instabilities during thin silicon film deposition Hrunski D, Grahlert W, Beese H, Kilper T, Gordijn A, Appenzeller W Thin Solid Films, 517(14), 4188, 2009 |
| 2 |
Process control of high rate microcrystalline silicon based solar cell deposition by optical emission spectroscopy Kilper T, van den Donker MN, Carius R, Rech B, Brauer G, Repmann T Thin Solid Films, 516(14), 4633, 2008 |
| 3 |
Microcrystalline silicon deposition: Process stability and process control van den Donker MN, Kilper T, Grunsky D, Rech B, Houben L, Kessels WMM, de Sanden MCMV Thin Solid Films, 515(19), 7455, 2007 |
| 4 |
Challenges in microcrystalline silicon based solar cell technology Rech B, Repmann T, van den Donker MN, Berginski M, Kilper T, Hupkes J, Calnan S, Stiebig H, Wieder S Thin Solid Films, 511, 548, 2006 |