검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Activation of group III combinations in silicon and modifications introduced by nitrogen Aronowitz S, Zubkov V, Puchner H, Kimball J Journal of Vacuum Science & Technology B, 20(1), 230, 2002 |
| 2 |
Plasma-induced nitridation of gate oxide dielectrics: Linked equipment-feature atomic scale simulations Sukharev V, Aronowitz S, Zubkov V, Puchner H, Haywood J, Kimball J Journal of Vacuum Science & Technology A, 17(4), 1356, 1999 |