검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Spectroscopic ellipsometry measurements of chromium nitride coatings Aouadi SM, Mihut DM, Kuruppu ML, Kirkpatrick SR, Rohde SL Journal of Vacuum Science & Technology A, 19(6), 2800, 2001 |
| 2 |
Process monitoring and control of low temperature reactively sputtered AlN Kirkpatrick SR, Rohde SL, Mihut DM, Kurruppu ML, Swanson JR, Thomson D, Woollam JA Thin Solid Films, 332(1-2), 16, 1998 |