검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Synthesis of poly[N-(1-adamantyl)vinylsulfonamide-co-2-(2-methyl)adamantyl methacrylatel for 193 nm lithography Fukuhara T, Shibasaki Y, Ando S, Kishimura S, Endo M, Sasago M, Ueda M Macromolecules, 38(8), 3041, 2005 |
| 2 |
Effect of Gaseous Permeability of Overcoat Layer on KrF Chemically Amplified Positive Resists Kishimura S, Sakai J, Tsujita K, Matsui Y Journal of Vacuum Science & Technology B, 14(6), 4234, 1996 |
| 3 |
Insolubilization Mechanism of Chemically Amplified Negative Photoresists Yamaguchi A, Kishimura S, Tsujita K, Morimoto H, Tsukamoto K, Nagata H Journal of Vacuum Science & Technology B, 11(6), 2867, 1993 |