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| No. | Article |
|---|---|
| 1 |
Vapor phase reactions in polymerization plasma for divinyisiloxane-bis-benzocyclobutene film deposition Kinoshita K, Nakano A, Kawahara J, Kunimi N, Hayashi Y, Kiso O, Saito N, Nakamura K, Kikkawa T Journal of Vacuum Science & Technology A, 24(6), 2192, 2006 |