검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Increased O(D-1) metastable flux with Ar and Kr diluted oxygen plasmas and improved film properties of grown SiO2 film Kitajimaa T, Nakano T, Makabe T Journal of Vacuum Science & Technology A, 26(5), 1308, 2008 |
| No. | Article |
|---|---|
| 1 |
Increased O(D-1) metastable flux with Ar and Kr diluted oxygen plasmas and improved film properties of grown SiO2 film Kitajimaa T, Nakano T, Makabe T Journal of Vacuum Science & Technology A, 26(5), 1308, 2008 |