검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Synchrotron-Radiation-Excited Etching and Total Electron Yield Measurement of Silicon and Silicon-Nitride Kitamura O, Terakado S, Suzuki S, Nakao M, Sekitani T, Tanaka K Journal of Vacuum Science & Technology A, 13(5), 2451, 1995 |
| 2 |
New Microfabrication Technique an a Submicrometer Scale by Synchrotron Radiation-Excited Etching Terakado S, Goto T, Ogura M, Kaneda K, Kitamura O, Suzuki S, Nakao M, Tanaka K Journal of Vacuum Science & Technology B, 13(6), 2175, 1995 |