검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
A review of the mechanical stressors efficiency applied to the ultra-thin body & buried oxide fully depleted silicon on insulator technology Morin P, Maitrejean S, Allibert F, Augendre E, Liu Q, Loubet N, Grenouillet L, Pofelski A, Chen KG, Khakifirooz A, Wacquez R, Reboh S, Bonnevialle A, le Royer C, Morand Y, Kanyandekwe J, Chanemougamme D, Mignot Y, Escarabajal Y, Lherron B, Chafik F, Pilorget S, Caubet P, Vinet M, Clement L, Desalvo B, Doris B, Kleemeier W Solid-State Electronics, 117, 100, 2016 |
| 2 |
Ultra-low resistivity in-situ phosphorus doped Si and SiC epitaxy for source/drain formation in advanced 20 nm n-type field effect transistor devices Loubet N, Adam T, Raymond M, Liu Q, Cheng KG, Sreenivasan R, Reznicek A, Khare P, Kleemeier W, Paruchuri V, Doris B, Sampson R Thin Solid Films, 520(8), 3149, 2012 |
| 3 |
Thin-Film Induced Stress in GaAs Ridge-Wave-Guide Structures Integrated with Sputter-Deposited ZnO Films Kim HK, Kleemeier W, Li YB, Langer DW, Cassidy DT, Bruce DM Journal of Vacuum Science & Technology B, 12(3), 1328, 1994 |