검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Elucidating Cu-glycine and BTA complexations in Cu-CMP using SIMS and XPS Deshpande S, Kuiry SC, Klimov M, Seal S Electrochemical and Solid State Letters, 8(4), G98, 2005 |
| 2 |
Chemical mechanical planarization of copper: Role of oxidants and inhibitors Deshpande S, Kuiry SC, Klimov M, Obeng Y, Seal S Journal of the Electrochemical Society, 151(11), G788, 2004 |