검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Fabrication of mesas with micro- and nanopatterned surface relief used as working stamps for step and stamp imprint lithography Schleunitz A, Spreu C, Haatainen T, Klukowska A, Schift H Journal of Vacuum Science & Technology B, 28(6), C6M37, 2010 |
| 2 |
Transparent hybrid polymer stamp copies with sub-50-nm resolution for thermal and UV-nanoimprint lithography Schift H, Spreu C, Saidani M, Bednarzik M, Gobrecht J, Klukowska A, Reuther F, Gruetzner G, Solak HH Journal of Vacuum Science & Technology B, 27(6), 2846, 2009 |
| 3 |
Easy mask-mold fabrication for combined nanoimprint and photolithography Schift H, Spreu C, Schleunitz A, Gobrecht J, Klukowska A, Reuther F, Gruetzner G Journal of Vacuum Science & Technology B, 27(6), 2850, 2009 |