화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Fabrication of three-dimensional mode converters for silicon-based integrated optics
Fritze M, Knecht J, Bozler C, Keast C, Fijol J, Jacobson S, Keating P, LeBlanc J, Fike E, Kessler B, Frish M, Manolatou C
Journal of Vacuum Science & Technology B, 21(6), 2897, 2003
2 Nanofabrication with deep-ultraviolet lithography and resolution enhancements
Fritze M, Palmateer S, Maki P, Knecht J, Chen CK, Astolfi D, Cann S, Denault S, Krohn K, Wyatt PW
Journal of Vacuum Science & Technology B, 17(6), 3310, 1999