화학공학소재연구정보센터
검색결과 : 4건
No. Article
1 A comparative electrchemical study of copper deposition onto silicon from dilute and buffered hydrofluoric acids
Li G, Kneer EA, Vermeire B, Parks HG, Raghavan S, Jeon JS
Journal of the Electrochemical Society, 145(1), 241, 1998
2 Electrochemical impedance spectroscopy of copper deposition on silicon from dilute hydrofluoric acid solutions
Cheng X, Li G, Kneer EA, Vermeire B, Parks HG, Raghavan S, Jeon JS
Journal of the Electrochemical Society, 145(1), 352, 1998
3 Electrochemical Measurements During the Chemical-Mechanical Polishing of Tungsten Thin-Films
Kneer EA, Raghunath C, Mathew V, Raghavan S, Jeon JS
Journal of the Electrochemical Society, 144(9), 3041, 1997
4 Electrochemistry of Chemical-Vapor-Deposited Tungsten Films with Relevance to Chemical-Mechanical Polishing
Kneer EA, Raghunath C, Raghavan S, Jeon JS
Journal of the Electrochemical Society, 143(12), 4095, 1996