검색결과 : 9건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of high-mobility hydrogen-doped zinc oxide Macco B, Knoops HCM, Verheijen MA, Beyer W, Creatore M, Kessels WMM Solar Energy Materials and Solar Cells, 173, 111, 2017 |
| 2 |
"Zero-charge" SiO2/Al2O3 stacks for the simultaneous passivation of n(+) and p(+) doped silicon surfaces by atomic layer deposition van de Loo BWH, Knoops HCM, Dingemans G, Janssen GJM, Lamers MWPE, Romijn IG, Weeber AW, Kessels WMM Solar Energy Materials and Solar Cells, 143, 450, 2015 |
| 3 |
Atomic Layer Deposition of LiCoO2 Thin-Film Electrodes for All-Solid-State Li-Ion Micro-Batteries Donders ME, Arnoldbik WM, Knoops HCM, Kessels WMM, Notten PHL Journal of the Electrochemical Society, 160(5), A3066, 2013 |
| 4 |
Co3O4 as anode material for thin film micro-batteries prepared by remote plasma atomic layer deposition Donders ME, Knoops HCM, Kessels WMM, Notten PHL Journal of Power Sources, 203, 72, 2012 |
| 5 |
Remote Plasma Atomic Layer Deposition of Co3O4 Thin Films Donders ME, Knoops HCM, van de Sanden MCM, Kessels WMM, Notten PHL Journal of the Electrochemical Society, 158(4), G92, 2011 |
| 6 |
Conformality of Plasma-Assisted ALD: Physical Processes and Modeling Knoops HCM, Langereis E, van de Sanden MCM, Kessels WMM Journal of the Electrochemical Society, 157(12), G241, 2010 |
| 7 |
Optical emission spectroscopy as a tool for studying, optimizing, and monitoring plasma-assisted atomic layer deposition processes Mackus AJM, Heil SBS, Langereis E, Knoops HCM, van de Sanden MCM, Kessels WMM Journal of Vacuum Science & Technology A, 28(1), 77, 2010 |
| 8 |
Remote Plasma ALD of Platinum and Platinum Oxide Films Knoops HCM, Mackus AJM, Donders ME, van de Sanden MCM, Notten PHL, Kessels WMM Electrochemical and Solid State Letters, 12(7), G34, 2009 |
| 9 |
Deposition of TiN and TaN by Remote Plasma ALD for Cu and Li Diffusion Barrier Applications Knoops HCM, Baggetto L, Langereis E, van de Sanden MCM, Klootwijk JH, Roozeboom F, Niessen RAH, Notten PHL, Kessels WMM Journal of the Electrochemical Society, 155(12), G287, 2008 |