화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Effect of He addition on the heating characteristics of substrate surface irradiated by Ar thermal plasma jet
Okada T, Higashi S, Kaku H, Koba N, Murakami H, Miyazaki S
Thin Solid Films, 516(11), 3680, 2008
2 Control of substrate surface temperature in millisecond annealing technique using thermal plasma jet
Okada T, Higashi S, Kaku H, Koba N, Murakami H, Miyazaki S
Thin Solid Films, 515(12), 4897, 2007