검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Plasma-Induced Damage in a Planar Inductively-Coupled Etch Reactor Cotler TJ, Forster J, Barnes M, Kocon W Journal of the Electrochemical Society, 141(11), 3218, 1994 |
| No. | Article |
|---|---|
| 1 |
Plasma-Induced Damage in a Planar Inductively-Coupled Etch Reactor Cotler TJ, Forster J, Barnes M, Kocon W Journal of the Electrochemical Society, 141(11), 3218, 1994 |