검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Comparison of electron property measurements in an inductively coupled plasma made by Langmuir probe and laser Thomson scattering techniques Bowden MD, Kogano M, Suetome Y, Hori T, Uchino K, Muraoka K Journal of Vacuum Science & Technology A, 17(2), 493, 1999 |