검색결과 : 2건
| No. | Article |
|---|---|
| 1 |
Process Improvements in the Selective Epitaxial-Growth of Si1-xGex/Si Strained Layers in a Conventional Hot-Wall LPCVD System Lee IM, Takoudis CG, Wang WC, Denton JP, Neudeck GW, Koh MT, Kvam EP Journal of the Electrochemical Society, 144(3), 1095, 1997 |
| 2 |
Selective Epitaxial-Growth of Si1-xGex/Si Strained-Layers in a Tubular Hot-Wall Low-Pressure Chemical-Vapor-Deposition System Wang WC, Denton JP, Neudeck GW, Lee IM, Takoudis CG, Koh MT, Kvam EP Journal of Vacuum Science & Technology B, 15(1), 138, 1997 |