검색결과 : 1건
No. | Article |
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1 |
Hard amorphous CSixNy thin films deposited by RF nitrogen plasma assisted pulsed laser ablation of mixed graphite/Si3N4-targets Tharigen T, Lippold G, Riede V, Lorenz M, Koivusaari KJ, Lorenz D, Mosch S, Grau P, Hesse R, Streubel P, Szargan R Thin Solid Films, 348(1-2), 103, 1999 |