검색결과 : 2건
No. | Article |
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1 |
Hydrogen plasma irradiation and postannealing effects on crystalline quality at vicinal Si (100) surface Asai K, Komachi K, Kamei K, Katahama H Applied Surface Science, 153(2-3), 134, 2000 |
2 |
Electric-Field in Surface-Wave-Produced Plasmas Komachi K Journal of Vacuum Science & Technology A, 12(3), 769, 1994 |