검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Integrated barrier/plug fill schemes for high aspect ratio Gb DRAM contact metallization Chen YP, Dixit GA, Lu JP, Hsu WY, Konecni AJ, Luttmer JD, Havemann RH Thin Solid Films, 320(1), 73, 1998 |
| No. | Article |
|---|---|
| 1 |
Integrated barrier/plug fill schemes for high aspect ratio Gb DRAM contact metallization Chen YP, Dixit GA, Lu JP, Hsu WY, Konecni AJ, Luttmer JD, Havemann RH Thin Solid Films, 320(1), 73, 1998 |