검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Mass spectrometric measurements on inductively coupled fluorocarbon plasmas: Positive ions, radicals and endpoint detection Li X, Schaepkens M, Oehrlein GS, Ellefson RE, Frees LC, Mueller N, Korner N Journal of Vacuum Science & Technology A, 17(5), 2438, 1999 |