검색결과 : 3건
| No. | Article |
|---|---|
| 1 |
Insights into the high-rate growth of highly crystallized silicon films from inductively coupled plasma of H-2-diluted SiH4 Kosku N, Miyazaki S Thin Solid Films, 511, 265, 2006 |
| 2 |
Influence of substrate do bias on crystallinity of silicon films grown at a high rate from inductively-coupled plasma CVD Kosku N, Murakami H, Higashi S, Miyazaki S Applied Surface Science, 244(1-4), 39, 2005 |
| 3 |
High-rate deposition of highly crystallized silicon films from inductively coupled plasma Kosku N, Kurisu F, Takegoshi M, Takahashi H, Miyazaki S Thin Solid Films, 435(1-2), 39, 2003 |