검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates Elers KE, Saanila V, Li WM, Soininen PJ, Kostamo JT, Haukka S, Juhanoja J, Besling WFA Thin Solid Films, 434(1-2), 94, 2003 |
| No. | Article |
|---|---|
| 1 |
Atomic layer deposition of WxN/TiN and WNxCy/TiN nanolaminates Elers KE, Saanila V, Li WM, Soininen PJ, Kostamo JT, Haukka S, Juhanoja J, Besling WFA Thin Solid Films, 434(1-2), 94, 2003 |