화학공학소재연구정보센터
검색결과 : 2건
No. Article
1 Electroless Nickel-Plated Aluminum-Alloy Conflat Flange and Chamber
Watanabe F, Koyatsu Y, Fujimori K, Miki H, Kasai A, Sato T, Miyamoto K
Journal of Vacuum Science & Technology A, 13(1), 140, 1995
2 Attaining an Ultralow Outgassing Rate of 10(-12) Pa M(3) S(-1) M(-2) from an Oxygen-Free High-Conductivity Copper Chamber with Beryllium-Copper-Alloy Flanges
Watanabe F, Koyatsu Y, Miki H
Journal of Vacuum Science & Technology A, 13(5), 2587, 1995