화학공학소재연구정보센터
검색결과 : 8건
No. Article
1 Measurement of the Gas Temperature in Fluorocarbon Radio-Frequency Discharges Using Infrared-Absorption Spectroscopy
Haverlag M, Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 14(2), 380, 1996
2 Production and Destruction of Cfx Radicals in Radiofrequency Fluorocarbon Plasmas
Haverlag M, Stoffels WW, Stoffels E, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 14(2), 384, 1996
3 In-Situ Infrared-Absorption Spectroscopy of Dusty Plasmas
Kroesen GM, Denboer JH, Boufendi L, Vivet F, Khouli M, Bouchoule A, Dehoog FJ
Journal of Vacuum Science & Technology A, 14(2), 546, 1996
4 Dust Formation and Charging in an Ar/SiH4 Radiofrequency Discharge
Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 14(2), 556, 1996
5 Detection of Dust Particles in the Plasma by Laser-Induced Heating
Stoffels WW, Stoffels E, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 14(2), 588, 1996
6 Negative-Ions in a Ccl2F2 Radio-Frequency Discharge
Stoffels E, Stoffels WW, Vender D, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 13(4), 2051, 1995
7 The Chemistry of a Ccl2F2 Radio-Frequency Discharge
Stoffels WW, Stoffels E, Haverlag M, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 13(4), 2058, 1995
8 Measurements of Radical Densities in Radiofrequency Fluorocarbon Plasmas Using Infrared-Absorption Spectroscopy
Haverlag M, Stoffels E, Stoffels WW, Kroesen GM, Dehoog FJ
Journal of Vacuum Science & Technology A, 12(6), 3102, 1994