검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Physical characterization of thin ALD-Al2O3 films Jakschik S, Schroeder U, Hecht T, Krueger D, Dollinger G, Bergmaier A, Luhmann C, Bartha JW Applied Surface Science, 211(1-4), 352, 2003 |
| No. | Article |
|---|---|
| 1 |
Physical characterization of thin ALD-Al2O3 films Jakschik S, Schroeder U, Hecht T, Krueger D, Dollinger G, Bergmaier A, Luhmann C, Bartha JW Applied Surface Science, 211(1-4), 352, 2003 |