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| No. | Article |
|---|---|
| 1 |
Submicron three-dimensional structures fabricated by reverse contact UV nanoimprint lithography Kehagias N, Reboud V, Chansin G, Zelsmann M, Jeppesen C, Reuther F, Schuster C, Kubenz M, Gruetzner G, Torres CMS Journal of Vacuum Science & Technology B, 24(6), 3002, 2006 |