검색결과 : 1건
| No. | Article |
|---|---|
| 1 |
Electron beam lithography with negative Calixarene resists on dense materials: Taking advantage of proximity effects to increase pattern density Buhlmann S, Muralt P, Kuenzi PA, Staufer U Journal of Vacuum Science & Technology B, 23(5), 1895, 2005 |